JPH0452686Y2 - - Google Patents
Info
- Publication number
- JPH0452686Y2 JPH0452686Y2 JP1986195868U JP19586886U JPH0452686Y2 JP H0452686 Y2 JPH0452686 Y2 JP H0452686Y2 JP 1986195868 U JP1986195868 U JP 1986195868U JP 19586886 U JP19586886 U JP 19586886U JP H0452686 Y2 JPH0452686 Y2 JP H0452686Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- temperature sensing
- electrode
- rate sensor
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000035945 sensitivity Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986195868U JPH0452686Y2 (en]) | 1986-12-22 | 1986-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986195868U JPH0452686Y2 (en]) | 1986-12-22 | 1986-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63101865U JPS63101865U (en]) | 1988-07-02 |
| JPH0452686Y2 true JPH0452686Y2 (en]) | 1992-12-10 |
Family
ID=31154152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986195868U Expired JPH0452686Y2 (en]) | 1986-12-22 | 1986-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452686Y2 (en]) |
-
1986
- 1986-12-22 JP JP1986195868U patent/JPH0452686Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63101865U (en]) | 1988-07-02 |
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